|Thin Film Piezoelectric ZnO Based Acoustic Wave Resonators and Applications|
摘要：ZnO is a semiconductor, optoelectrinic and also a piezoelectric material with high piezoelectric constant and electromechanical coupling coefficient with a wide range applications such as resonators for communications as frequency generators, duplicators and mixers, as sensors for sensing physical parameters such as temperature, strain etc as well as biochemical substances. Recently ZnO piezoelectric actuators have found for unique applications in microfluidic and lab-on-a-chip systems. Since ZnO can be deposited in thin film form, ZnO devices can be fabricated on various substrates integrated with others to form microsystems and with IC for control and signal processing. We have developed technologies to deposit high quality ZnO thin films, and have fabricated surface acoustic wave (SAW) resonators and film bulk acoustic resonators (FBAR) with high performance. We have further used them to develop SAW-based microfluidics to manipulate fluids in microscale and concentrate microparticles for lab-on-a-chip applications, and various FBAR-based sensors to sense temperature, pressure, gases and biochemical molecules. Lab-on-a-chip systems have great potential for diagnosis of diseases/illness at early stage, prevention of pandemics, forensic investigation and antiterrorist etc, and have been regarded as one of the important microsystems which may change the healthcare, medical and drug development industries. Our target is to develop lab-on-chip systems with integrated microfluidics and sensor array operated by a single acoustic wave mechanism, which simplifies the fabrication process and operation with simple electronics. This talk will report the progress on SAW-based microfluidics and its functions for pumping, mixing, droplet generation and particle concentration, and on FBAR sensors for sensing physical parameters such as temperature, humidity and pressure, as well as biochemical molecules. It will also highlight the work on unique high quality FBAR devices using carbon nanotubes (CNTs) as the electrode which exhibited a quality factor >2000 and high sensitivity for biochemical sensing, and flexible SAW devices.
Jack Luo received his PhD from the University of Hokkaido, Japan. He worked in Cardiff University, UK, Newport Wafer Fab. Ltd., Philips Semiconductor Co. and Cavendish Kinetics Ltd., Cambridge University. From January 2007, he became a Professor in MEMS at the Centre for Material Research and Innovation (CMRI), University of Bolton. He is the director of Institute of Microelectronics and Optoelectronics, Zhejiang University. His current research interests focus on nanomaterials and nanodevices, flexible electronics, microsystems and sensors for lab-on-a-chip, and healthcare applications.